Plasma Based Material Deposition
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Time |
Action Items |
Completed Items |
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April.12.2004 - April.26.2004 |
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April.26.2004 - May.3.2004 |
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May.3.2004 - Beyond |
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Functional Part |
Raw Mater |
Machines |
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Cathode Holder/ Gas Inlet |
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Cathode |
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Anode |
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Inductively Coupled Plasma Dielectric |
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High Voltage Plasma Source |
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Current Source |
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