Skip to main content Link Menu Expand (external link) Document Search Copy Copied
865 Meche Design

Wafer Steppers

How an ASML Lithography Machine Moves a Wafer

asml-litho

air-bearings-and-interferometers

metroframe
bodes

Performance Results of a New Generation of 300mm Lithography Systems
Control of Wafer Scanners: Methods and Developments

  • linear motors (long stroke) and voice coil actuators (short stroke)
  • older generations were air-bearings and differential interferometers
  • latest (in a vacuum) are maglev on hallbach arrays w/ many interferometers

maglev

NIST MechE

one one one one one one one one

Copyright © 2021 MIT Center for Bits and Atoms. This work may be reproduced, modified, distributed, performed, and displayed for any purpose, but must acknowledge the Machines that Make project. Copyright is retained and must be preserved. The work is provided as is; no warranty is provided, and users accept all liability.